Ludl, 99S103, 8"x8" Semiconductor Stage, Open Loop, 230 mm Insert
Features:
- 203mm x 203mm (8" x 8" ) travel range
- Low profile, ergonomic design
- High resolution linear encoder with 0.1µm resolution
- Hardened, ground crossed roller bearing guide ways
- 4µm accuracy over full range of travel
- Solid aluminum insert plate standard
For 200mm wafer applications, the 8"x8" stage is the obvious choice. Its compact size and high performance can convert a routine microscope into a highly productive asset.
With little compromise, the reduced envelope also makes integration with loaders easier. As a result of the compact envelope, the insert cutout is 193mm square. This is identical to the 6"x6" stage and only provides transmitted light capability over the center 150mm of travel.
Built to exact standards, this stage has specifications that meet or exceed the requirements of routine semiconductor microscopy. Compatible with reflected and transmitted light applications, the standard insert plate can accept a variety of options including motorized rotating vacuum wafer chuck, fixed vacuum chuck, glass plate and other custom holders.
Other features such as adjustable end-limits, anti-creep roller cages and universal mounting make this stage an excellent choice for metrology and inspection applications.
